Development of Cupric Oxide/Porous Silicon (CuO/PS) Heterostructure Enabled Room Temperature Methane Sensor for Enhanced Industrial Safety
Abstract
This manuscript reports the development and characterization of a methane gas sensor based on a copper oxide/porous silicon (CuO/PS) heterostructure. The sensor integrates the CuO layer on the PS surface, obtained by the DC magnetron sputtering technology, which enhances the sensor’s surface area and facilitates gas molecule interaction. We present an analysis of the sensor’s morphological and structural characteristics, including detailed scanning electron microscopy (SEM) and X-ray diffraction (XRD) studies, which reveal the effective formation and interface of the heterostructure. The sensor demonstrates performance with good sensitivity to methane, characterized by a dynamic response. Sensitivity tests show a significant increase in signal response, and dynamic response evaluations indicate the repeatability of the sensor. The results suggest that the CuO/PS sensor offers a promising solution for methane detection, with potential applications in environmental monitoring, industrial safety, and process control.