Lithography and 3D Fabrication Processes: A Review
Abstract
The present review provides in-depth insights of the various lithographic processes that are currently being used in academic and industrial research labs for fabricating various micro- and nano-scale devices. All the patterning techniques discussed in this review have their own unique set of characteristics and use-case depending on the design requirement of the devices that need to be fabricated. This has tremendous implications in the electronic industry.